Semiconductor Manufacturing

High-performance hermetic sealing for the semiconductor industry

Our longstanding experience with semiconductor processing machinery allows us to design, manufacture and deliver high-performance hermetically sealed feedthroughs and engineered feedthrough subassemblies with the shortest lead times you'll find anywhere.

Ideal Applications

  • Hermetically sealed feedthroughs bring multiple signal, power and air lines through a single vacuum chamber port to fully populated PCBs.
  • High-current power connections for processing chambers using 750-amp StudSeal™ feedthroughs.
  • Compact hermetic power and sensor seals for wafer transfer motor and drive systems.
  • Single or multiple optical fiber feedthrough for optical detection of wafer cassette position in load lock.
  • Pogo pin feed-through for quick and easy mating to contact pads on PCB. Connectorized wire side for quick and accurate installation.
  • Heated paddle subassemblies and multi-cable vacuum penetrations.

Technical Advantages

  • High vacuum containment with low-outgassing epoxy (0.33% TML, 0.00% CVCM).
  • Quick turnaround of hermetic feedthroughs, including those with complex cable harnesses and custom flange geometries.
  • Fully-tested turnkey subassemblies for wafer-processing equipment like ion etch tools, ion implant systems and in-line vacuum applications.
  • One hundred percent leak tested with typical leakage rates less than 1x10-9 cc-He/sec
  • Drop-in replacements for common feedthrough components.
Douglas Electrical
Address:    5 Middlebury Blvd.
Randolph, NJ 07869
Tel:    973.627.8230
Fax:   866.206.6916
General inquiries:
T 973.627-8230
Technical information:
T 973.627-8230

Engineered Hermetic Seals and Connectors for Wire and Cable

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